Novel Honeycomb SOI Structure with Low Parasitic Capacitance for Human-Sensing Accelerometer. - Tokuji Yokomatsu; Haruka Takeuchi; Yoshikazu Miyagawa; Kensuke Kanda; Takayuki Fujita; Kohei Higuchi; Kazusuke Maenaka (ICETET, 2012)

Acceleration sensor using SOI wafer with honeycomb insulator. - Yoshikazu Miyagawa; Kensuke Kanda; Takayuki Fujita; Kazusuke Maenaka; Tokuji Yokomatsu; Haruka Takeuchi; Kohei Higuchi (SMC, 2012)