The influence of growth temperature and precursors' doses on electrical parameters of ZnO thin films grown by atomic layer deposition technique. - Tomasz Krajewski; E. Guziewicz; Marek Godlewski; Lukasz Wachnicki; I. A. Kowalik; A. Wojcik-Glodowska; M. Lukasiewicz; K. Kopalko; V. Osinniy; M. Guziewicz (Microelectron. J., 2009)