Micro-compression study of Ni-Fe(Co)-Ga magnetic shape memory alloy for MEMS sensors. - Kengo Igawa; Tso-Fu Mark Chang; Chun-Yi Chen; Akira Umise; Takashi Nagoshi; Masaki Tahara; Tomonari Inamura; Hideki Hosoda; Volodymyr A. Chernenko; Masato Sone (IEEE SENSORS, 2017)