Intelligent Proximity Correction Enabled Large-Area Metasurfaces by KrF Photolithography. - Hsueh-Li Liu; Sheng-Hsiang Su; Po-Kai Chang; You-Chia Chang; Yao-Wei Huang; Chia-Wei Chang; Tsai-Ming Huang; Chun-Chi Chen; Wen-Hsien Huang; Jia-Min Shieh; Peichen Yu (IEEE Access, 2025)