A64FX: 52-Core Processor Designed for the 442PetaFLOPS Supercomputer Fugaku. - Shuji Yamamura; Yasunobu Akizuki; Hideyuki Sekiguchi; Takumi Maruyama; Tsutomu Sano; Hiroyuki Miyazaki; Toshio Yoshida (ISSCC, 2022)