Usage of Porous Al2O3 Layers for RH Sensing - Veronika Timár-Horváth; László Juhász; András Vass-Várnai; Gergely Perlaky (CoRR, 2008)

Porous Alumina Based Capacitive MEMS RH Sensor - László Juhász; András Vass-Várnai; Veronika Timár-Horváth; Marc P. Y. Desmulliez; Resh Dhariwal (CoRR, 2008)