Technological process effects on SAW sensors devices characteristics and FEM estimation. - Maxence Rube; Corinne Dejous; Ollivier Tamarin; Hamida Hallil; Veronique Conedera; Adrian Laborde; Jean-Luc Lachaud; Martine Sebeloue; Laurent Linguet; Dominique Rebière (IEEE SENSORS, 2019)