Free Standing Stress Amplification Structure for Ultrasensitive 3C-SiC/Si Pressure Sensor. - Braiden Tong; Hong-Quan Nguyen; Tuan-Hung Nguyen; Tuan-Khoa Nguyen; Viet Thanh Nguyen; Toan Dinh; Trung-Hieu Vu; Van Thanh Dau; Dzung Viet Dao (IEEE SENSORS, 2022)