A Novel D2 Plasma Treatment for Defect Passivation: From Modeling to Process Optimization. - Sara Vecchi; Vikram Bhosle; Andrea Palmieri; Davide Cornigli; Fabrizio Buscemi; Andrea Padovani; Deven Raj; Andrew Cockburn; Lucien Date; Gaurav Thareja; Federico Nardi; Luca Larcher (IRPS, 2025)