Analysis of multiple process flows in an ASIC fab with a detailed photolithography area model. - Kamil Erkan Kabak; Cathal Heavey; Vincent Corbett (WSC, 2008)

Performance improvement for a wet bench tool. - Kamil Erkan Kabak; Cathal Heavey; Vincent Corbett (WSC, 2010)

Capacity modelling of a wet bench cluster tool with material handling robot. - Kamil Erkan Kabak; Cathal Heavey; Vincent Corbett (Int. J. Comput. Integr. Manuf., 2012)