Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities. - Thomas F. Edgar; Stephanie W. Butler; W. Jarrett Campbell; Carlos Pfeiffer; Christopher A. Bode; Sung Bo Hwang; K. S. Balakrishnan; Juergen Hahn (Autom., 2000)

A comparison of run-to-run control algorithms. - W. Jarrett Campbell; Stacy K. Firth; Anthony J. Toprac; Thomas F. Edgar (ACC, 2002)