Techniques to study the reliability of metal RF MEMS capacitive switches. - Ingrid De Wolf; W. Merlijn van Spengen (Microelectron. Reliab., 2002)

MEMS reliability from a failure mechanisms perspective. - W. Merlijn van Spengen (Microelectron. Reliab., 2003)

First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls. - Federico Buja; Jaap Kokorian; Anirudha V. Sumant; W. Merlijn van Spengen (NEMS, 2014)