Adaptive Modelling for Anomaly Detection and Defect Diagnosis in Semiconductor Smart Manufacturing: A Domain-specific AutoML. - Weihong Zhai; Xiupeng Shi; Zeng Zeng (CIS-RAM, 2023)

Explainable AutoML (xAutoML) with adaptive modeling for yield enhancement in semiconductor smart manufacturing. - Weihong Zhai; Xiupeng Shi; Yiik Diew Wong; Qing Han; Lisheng Chen (CoRR, 2024)