A PZT-Driven 6-DOF High-Speed Micromanipulator for Circular Vibration Simulation and Whirling Flow Generation. - Weikun Luo; Xiaoming Liu 007; Xiaoqing Tang; Dan Liu 009; Masaru Kojima; Qiang Huang 002; Tatsuo Arai (IEEE Robotics Autom. Lett., 2022)