Evaluating nanotribological behavior of annealing Si0.8Ge0.2/Si films. - Ming-Jhang Wu; Hua-Chiang Wen; Shyh-Chi Wu; Ping-Feng Yang; Yi-Shao Lai; Wen-Kuang Hsu; Wen-Fa Wu; Chang-Pin Chou (Microelectron. Reliab., 2011)