Design and Characterization of Resonant Pressure Microsensor Based on Parametric Pump. - Wenliang Xia; Bo Xie 006; Yulan Lu; Junbo Wang 002; Deyong Chen; Jian Chen 012; Nan Li; Xiaoye Huo (SENSORS, 2023)

A Resonant MEMS Pressure Sensor Utilizing Higher-Order Mode Oscillation. - Wenliang Xia; Bo Xie 006; Yulan Lu; Junbo Wang 002; Deyong Chen; Jian Chen 012 (IEEE SENSORS, 2024)