Modeling and Optimization of ScAlN-based MEMS Mirror with Large Static Two-axis Tilting Angle. - Changhe Sun; Bolun Li; Wenqu Su; Yufei Liu; Yaming Wu (NEMS, 2021)

Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles. - Changhe Sun; Yufei Liu 004; Bolun Li; Wenqu Su; Mingzhang Luo; Guofeng Du; Yaming Wu (Sensors, 2021)