Optimized design of piezoresistive pressure sensor for improved linearity and sensitivity. - Wenshan Chen; Xiaoshan Zheng; Xuyuan Chen (NEMS, 2010)

Stress in Si-glass anodic bonding and its effect on silicon piezoresistive pressure sensor. - Xiaoshan Zheng; Wenshan Chen; Xuyuan Chen (NEMS, 2010)