Performance evaluation of the thin film area in an IC wafer fabrication system using Petri nets. - MuDer Jeng; Chi Liang Chuang; WenYuan Hung (SMC, 1998)

Markovian timed Petri nets for performance analysis of semiconductor manufacturing systems. - MuDer Jeng; Xiaolan Xie; WenYuan Hung (IEEE Trans. Syst. Man Cybern. Part B, 2000)