Innovating at Speed and at Scale: A Next Generation Infrastructure for Accelerating Semiconductor Technologies. - Richard A. Gottscho; Edlyn V. Levine; Tsu-Jae King Liu; Paul C. McIntyre; Subhasish Mitra; Boris Murmann; Jan M. Rabaey; Sayeef S. Salahuddin; Willy C. Shih; H.-S. Philip Wong (CoRR, 2022)