An 18.5nF-Input-Range PM-SAR-Hybrid Capacitance-to-Digital Converter Achieving 6.1μs Conversion Time at 18.1pF Input Capacitance. - Donghyun Youn; Kyeongwon Jeong; Woongro Youn; Hoyong Seong; Yechan Park; Sohmyung Ha; Minkyu Je (ISSCC, 2025)