Nanotribological properties of ALD-processed bilayer TiO2/ZnO films. - Wun-Kai Wang; Hua-Chiang Wen; Chun-Hu Cheng; Ching-Hua Hung; Wu-Ching Chou; Wei-Hung Yau; Ping-Feng Yang; Yi-Shao Lai (Microelectron. Reliab., 2014)