Investigation of the Reliability of the Interconnection between Metal Electrode and Silicon Anchor in Silicon-on-Glass Process. - Mengxia Liu; Xianshan Dong; Jian Cui; Qiancheng Zhao (NEMS, 2021)

Vibration Characteristic Measurement Method of MEMS Gyroscopes in Vacuum, High and Low Temperature Environment and Verification of Excitation Method. - Wenhao Luo; Wei Su 011; Zhenhua Nie; Qinwen Huang; Shiyuan Li; Xianshan Dong (IEEE Access, 2021)