Ion-implantation-free trench-filled epitaxial superjunction TMBS diodes for high-voltage 4H-SiC applications. - Cheng-Hao Yu; Xiao-Dong Wu; Haitao Ge; Hao-Min Guo; Da-Wei Wang; Chun-Sheng Jiang; Xiang Wang; Wen-Sheng Zhao (Microelectron. J., 2026)