Development and characterization of TaN thin film resistor with CMOS compatible fabrication process. - Xiaoxu Kang; Limin Zhu; Xingwang Zhu; Qingyun Zuo; Xiaolan Zhong; Shoumian Chen; Yuhang Zhao 002; Shanshan Liu; Hanwei Lu; Jianmin Wang; Wei Wang; Bo Zhang (ASICON, 2017)

Development and Optimization of Contact Module Process for Micro-Bridge Structure based MEMS/Sensor Application. - Xiaoxu Kang; Xiaolan Zhong; Ming Li (ASICON, 2019)

Development and Characterization of High Temperature Plasma Nitridation Process for Advanced CMOS Technology Application. - Xiaoxu Kang; Xiaolan Zhong; Zhangfa Chen; Zhengkai Dao; Qiang Zhang; Hao Wan; Yamin Zhou; Ming Li; Yingjia Guo; Ran Nie; Tao Wu (ASICON, 2021)

Process Optimization for CMOS Compatible MEMS Capacitive Acoustic Sensor. - Ming Li; Xiaoxu Kang; Xiaolan Zhong (ASICON, 2021)

A Novel Etch Scheme to Form Sloped Profile by Standard Anisotropic CMOS Process. - Ming Li; Xiaoxu Kang; Xiaolan Zhong (ASICON, 2021)

Optimization of Protective Layer Process for Micro-bridge Structure based MEMS/Sensors Application. - Bo Zhang; Xiaoxu Kang; Xiaolan Zhong (ASICON, 2021)