Low-loss and Thermal-stable Ta2O5 Photonic Platform with Low-temperature Process. - Zhaoting Geng; Weiren Cheng; Zhenyu Liu; Mingjian You; Xiaolun Yu; Pengzhuo Wu; Ning Ding; Xingyu Tang; Yihan Liu; Li Shen; Qiancheng Zhao (OFC, 2024)