Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control. - Yunbo He; Xiquan Mai; Chengqiang Cui; Jian Gao 002; Zhijun Yang; Kai Zhang; Xun Chen 002; Yun Chen 002; Hui Tang 003 (IEEE Access, 2019)