A MEMS-based piezoelectric power generator array for vibration energy harvesting. - Jing-Quan Liu; Hua-Bin Fang; Zheng-Yi Xu; Xin-Hui Mao; Xiu-Cheng Shen; Di Chen; Hang Liao 002; Bing-Chu Cai (Microelectron. J., 2008)