Challenges of 22 nm and beyond CMOS technology. - Ru Huang 001; HanMing Wu; Jinfeng Kang; Deyuan Xiao; XueLong Shi; Xia An; Yu Tian; Runsheng Wang; Liangliang Zhang; Xing Zhang 002; Yangyuan Wang (Sci. China Ser. F Inf. Sci., 2009)