A direct-drive SCARA robot for wafer&ceramic-substrate handling based on visual servoing. - Yunbo He; Chang Zhang; Wentao Ye; Zuoxiong He; Xin Chen 005; Jian Gao 002; Kai Zhang; Zhijun Yang; Xun Chen 002; Yun Chen 002; Hui Tang 003 (CIS/RAM, 2017)

High Dynamic Control of a Flexure Fast Tool Servo Using On-line Sequential Extreme Learning Machine. - Zelong Wu; Hui Tang 003; Xin Chen 005; Jian Gao 002; Yunbo He; Ying Xu 001; Xun Chen 002; Suet To; Yangmin Li 001; Chengqiang Cui (AIM, 2018)

Development and Repetitive-Compensated PID Control of a Nanopositioning Stage With Large-Stroke and Decoupling Property. - Hui Tang 003; Jian Gao 002; Xin Chen 005; Kai-Ming Yu; Suet To; Yunbo He; Xun Chen 002; Zhaohe Zeng; Sifeng He; Chuangbin Chen; Yangmin Li 001 (IEEE Trans. Ind. Electron., 2018)

A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography. - Guixin Zhang; Hui Tang 003; Xun Chen 002; Xiaohui Guo; Jiedong Li; Haoyu Pan; Shuo Li (ICIRA (1), 2019)

Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control. - Yunbo He; Xiquan Mai; Chengqiang Cui; Jian Gao 002; Zhijun Yang; Kai Zhang; Xun Chen 002; Yun Chen 002; Hui Tang 003 (IEEE Access, 2019)

A Novel Self-Feedback Intelligent Vision Measure for Fast and Accurate Alignment in Flip-Chip Packaging. - Zelong Wu; Hui Tang 003; Zhaoyang Feng; Weimin Wang; Sifeng He; Jian Gao 002; Xin Chen 005; Yunbo He; Xun Chen 002 (IEEE Trans. Ind. Informatics, 2020)

Event-Triggered Optimal Control for Macro-Micro Composite Stage System via Single-Network ADP Method. - Xun Chen 002; Xin Chen 005; Weiwei Bai; Zijie Guo (IEEE Trans. Ind. Electron., 2021)

Event-Triggered Adaptive Control Design With Prescribed Performance for Macro-Micro Composite Positioning Stage. - Xun Chen 002; Yang Liu 077; Lanyu Zhang; Jian Gao 002; Bin Yang 036; Xin Chen 005 (IEEE Trans. Ind. Electron., 2021)

Novel Dynamic Microactuation Method for Tracking-Error Reduction of Permanent Magnet Linear Synchronous Motors. - Jindi Zhang; Jian Gao 002; Lanyu Zhang; Yuheng Luo; Xun Chen 002; Xin Chen 005; Yunbo He (IEEE Trans. Ind. Electron., 2022)