Design Optimization, Fabrication And Testing Of A Capacitive Silicon Accelerometer Using An Soi Approach. - K. N. Bhat; B. R. K. Reddy; V. Vinoth Kumar; K. Siva Kumar; Y. Sushma; N. Ramesh Babu; K. Natarajan (Int. J. Comput. Eng. Sci., 2003)