Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers - CMUT and PMUT. - Haleh Nazemi; Jenitha Antony Balasingam; Siddharth Swaminathan; Kenson Ambrose; Muhammad Umair Nathani; Tara Ahmadi; Yameema Babu Lopez; Arezoo Emadi (Sensors, 2020)