Chromatic and spherical aberration correction for silicon aplanatic solid immersion lens for fault isolation and photon emission microscopy of integrated circuits. - Bennett B. Goldberg; Abdulkadir Yurt; Yang Lu 004; Euan Ramsay; F. Hakan Köklü; J. Mertz; Thomas G. Bifano; M. S. Ünlü (Microelectron. Reliab., 2011)

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror. - Yang Lu 004; Euan Ramsay; Christopher R. Stockbridge; Abdulkadir Yurt; F. Hakan Köklü; Thomas G. Bifano; M. Selim Ünlü; Bennett B. Goldberg (Microelectron. Reliab., 2012)