Run-to-Run Control of Thermal Atomic Layer Deposition. - Yichi Zhang; Yangyao Ding; Zhe Wu 004; Panagiotis D. Christofides (MED, 2020)

Computational fluid dynamics-based in-situ sensor analytics of direct metal laser solidification process using machine learning. - Yi Ming Ren; Yichi Zhang; Yangyao Ding; Yongjian Wang; Panagiotis D. Christofides (Comput. Chem. Eng., 2020)

Multiscale computational fluid dynamics modeling and reactor design of plasma-enhanced atomic layer deposition. - Yichi Zhang; Yangyao Ding; Panagiotis D. Christofides (Comput. Chem. Eng., 2020)

Machine learning-based modeling and operation of plasma-enhanced atomic layer deposition of hafnium oxide thin films. - Yangyao Ding; Yichi Zhang; Ho Yeon Chung; Panagiotis D. Christofides (Comput. Chem. Eng., 2021)

Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films. - Sungil Yun; Yangyao Ding; Yichi Zhang; Panagiotis D. Christofides (Comput. Chem. Eng., 2021)