Overcome the End of Life of 3D Flash Memory by Recovery Annealing, Aiming for Carbon Neutrality in Semiconductor Manufacturing. - Hitomi Tanaka; Hajime Sano; Reika Ichihara; Yuta Aiba; Kazuma Hasegawa; Kana Kudo; Chieko Tokunaga; Yasuhito Yoshimizu; Fumie Kikushima; Tomoya Sanuki (IMW, 2024)