Multivariate Simulation Assessment for Virtual Metrology. - Yeh-Tung Chen; Haw Ching Yang; Fan-Tien Cheng (ICRA, 2006)

Method for Evaluating Reliance Level of a Virtual Metrology System. - Fan-Tien Cheng; Yeh-Tung Chen; Yu-Chuan Su; Deng-Lin Zeng (ICRA, 2007)