Eco-friendly, High-Resolution Fluorescence Diamond-Based Broadband EUV and X-Ray Beam Profiler System. - Yu-Hsin Yang; Ya-Ting Kang; Tzu-Ping Huang; Yin-Yu Lee; Yu-Chan Lin; Pei-Jie Wu; Guo-Hao Lu; Chun-Jen Weng; Chi-Hung Hwang; Wen-Tse Hsiao; Chi-Chung Kei; Wen-Hao Cho; et al. (I2MTC, 2025)