Equipment design and process control of critical dimensions in lithography. - Yit Sung Ngo; Geng Yang; Andi Sudjana Putra; Kar Tien Ang; Arthur Tay; Zhong Ping Fang (ICCA, 2010)

Equipment Design and Control of Advanced Thermal-Processing Module in Lithography. - Arthur Tay; Hui Tong Chua; Yuheng Wang; Yit Sung Ngo (IEEE Trans. Ind. Electron., 2010)