Silicon Mach-Zehnder modulator using low-loss phase shifter with bottom PN junction formed by restricted-depth doping. - Kazuhiro Goi; Kensuke Ogawa; Yong Tsong Tan; Vivek Dixit; Soon Thor Lim; Ching Eng Png; Tsung-Yang Liow; Xiaoguang Tu; Guo-Qiang Lo; Dim-Lee Kwong (IEICE Electron. Express, 2013)