Defect Detection in Photolithographic Patterns Using Deep Learning Models Trained on Synthetic Data. - Prashant P. Shinde; Priyadarshini P. Pai; Shashishekar P. Adiga; K. Subramanya Mayya; Yongbeom Seo; Myungsoo Hwang; Heeyoung Go; Changmin Park (CoRR, 2025)