Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano Systems. - Dong-Il Cho; Byoung-Doo Choi; Sangwoo Lee; Seung Joon Paik; Sangjun Park 001; Jaehong Park; Yonghwa Park; Jongpal Kim; Il-Woo Jung (Int. J. Comput. Eng. Sci., 2003)