Process integration and nanometer-scale electrical characterization of crystalline high-k gate dielectrics. - Udo Schwalke; Yordan Stefanov (Microelectron. Reliab., 2005)

Electrical characterization of crystalline Gd2O3 gate dielectric MOSFETs fabricated by damascene metal gate technology. - Ralf Endres; Yordan Stefanov; Udo Schwalke (Microelectron. Reliab., 2007)