An RF MEMS Variable Capacitor with Intelligent Bipolar Actuation. - Tamio Ikehashi; Takayuki Miyazaki; Hiroaki Yamazaki; Atsushi Suzuki; Etsuji Ogawa; Shinji Miyano; Tomohiro Saito; Tatsuya Ohguro; Takeshi Miyagi; Yoshiaki Sugizaki; Nobuaki Otsuka; Hideki Shibata; et al. (ISSCC, 2008)

The effects of poly-SiGe on sensing properties for ultra-low-power CMOS-embedded MEMS sensors. - Yoshihiko Kurui; Hideyuki Tomizawa; Akira Fujimoto; Tomohiro Saito; Akihiro Kojima; Tamio Ikehashi; Yoshiaki Sugizaki; Hideki Shibata (IEEE SENSORS, 2017)