Note on CapsNet-Based Wafer Map Defect Pattern Classification. - Itsuki Fujita; Yoshikazu Nagamura; Masayuki Arai; Satoshi Fukumoto (ATS, 2021)

Toward Improvement and Evaluation of Reconstruction Capability of CapsNet-Based Wafer Map Defect Pattern Classifier. - Yuki Yamanaka; Masayuki Arai; Yoshikazu Nagamura; Satoshi Fukumoto (ITC-Asia, 2023)