Optimization problems for plasma-induced damage - A concept for plasma-induced damage design. - Koji Eriguchi; Yoshinori Nakakubo; Asahiko Matsuda; Masayuki Kamei; Yoshinori Takao; Kouichi Ono (ICICDT, 2012)

Atomistic simulations of plasma process-induced Si substrate damage - Effects of substrate bias-power frequency. - Asahiko Matsuda; Yoshinori Nakakubo; Yoshinori Takao; Koji Eriguchi; Kouichi Ono (ICICDT, 2013)