Optimization problems for plasma-induced damage - A concept for plasma-induced damage design. - Koji Eriguchi; Yoshinori Nakakubo; Asahiko Matsuda; Masayuki Kamei; Yoshinori Takao; Kouichi Ono (ICICDT, 2012)

Atomistic simulations of plasma process-induced Si substrate damage - Effects of substrate bias-power frequency. - Asahiko Matsuda; Yoshinori Nakakubo; Yoshinori Takao; Koji Eriguchi; Kouichi Ono (ICICDT, 2013)

A new aspect of plasma-induced physical damage in three-dimensional scaled structures - Sidewall damage by stochastic straggling and sputtering. - Koji Eriguchi; Yoshinori Takao; Kouichi Ono (ICICDT, 2014)

Random telegraph noise as a new measure of plasma-induced charging damage in MOSFETs. - Masayuki Kamei; Yoshinori Takao; Koji Eriguchi; Kouichi Ono (ICICDT, 2014)