Fabrication of high performance AlGaN/GaN FinFET by utilizing anisotropic wet etching in TMAH solution. - Dong-Hyeok Son; Young-woo Jo; Ryun-Hwi Kim; Chan Heo; Jae Hwa Seo; Jin Su Kim; In Man Kang; Sorin Cristoloveanu; Jung-Hee Lee (ESSDERC, 2015)