A New Class of Sequences Without Interferences for Cluster Tools With Tight Wafer Delay Constraints. - Yuchul Lim; Tae-Sun Yu; Tae-Eog Lee (IEEE Trans Autom. Sci. Eng., 2019)

Adaptive Scheduling of Cluster Tools With Wafer Delay Constraints and Process Time Variation. - Yuchul Lim; Tae-Sun Yu; Tae-Eog Lee (IEEE Trans Autom. Sci. Eng., 2020)