Ultralow impedance evaluation system of wideband frequency for power distribution network of decoupling capacitor embedded substrates. - Katsuya Kikuchi; Koichi Takemura; Chihiro Ueda; Osamu Shimada; Toshio Gomyo; Yukiharu Takeuchi; Toshikazu Okubo; Kazuhiro Baba; Masahiro Aoyagi; Toshio Sudo; Kanji Otsuka (3DIC, 2009)