High Thermal Conductivity AlN Films for Advanced 3D Chiplets. - Takeshi Takagi; Takeki Ninomiya; Masaaki Niwa; Soken Obara; Takeshi Momose; Yukihiro Shimogaki; Masahiro Nomura; Hiroshi Fujioka; Masakazu Mori; Tadahiro Kuroda (VLSI Technology and Circuits, 2024)